EMERGE

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AMFitzgerald executed:

• Foundry selection
• Mask tapeout
• Tech transfer
• Wafer test and measurement

LAWRENCE LIVERMORE NATIONAL LABORATORY

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AMFitzgerald has been working with LLNL to develop a novel three-axis micro-mirror with tip, tilt, and piston capability since 2011. The mirror is being developed for high-performance adaptive optics applications such as LIDAR and maskless lithography. Our responsibilities included:

• Working with LLNL scientists to adapt their designs for MEMS processing.
• Design, layout, and fabrication of several generations of mirror prototypes. AMFitzgerald engineers are performing all prototype fabrication at UCB Marvell Nanolab
• Perform metrology and process de-bugging
• In a more advanced prototype, integrated a third-party polysilicon through silicon vias (TSV) to improve mirror fill factor

PolyOptic Technologies, Inc.

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We designed two custom in-plane electrostatic switches, one having linear drive and the other rotary drive, for a micro fiber optical switching application. Our responsibilities included:

• ANSYS Multiphysics modeling and analytical modeling to size motor force, deflection, and operating voltage
• Interface with foundry engineers on process and design rules, tool capabilities, short loops
• Process integration and runsheet development
• Photomask layout and tapeout to 150 mm foundry
• Managed foundry engineers on behalf of client, reviewed in process data and provided foundry engineers with technical advice on wafers in progress
• Performed wafer-level electrical test on finished foundry wafers to confirm functionality. Used initial test data to further tune ANSYS models.
• Packaged switches in commercially-available open cavity packages and performed benchtop functional testing of switches

SOFANT TECHNOLOGIES, LTD

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• AMFitzgerald performed electrostatic simulations using ANSYS
• Developed a full process flow and fabricated prototypes
• AMFitzgerald later assisted with 200 mm foundry transfer and process improvements

INTERNATIONAL MEDICAL DEVICE COMPANY

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• The client was seeking a MEMS single-axis accelerometer for a cardiac pacemaker application. Due to the application, the client needed an unusual chip geometry.
• AMFitzgerald first conducted a broad survey to see if any commercially-available MEMS sensors might be used. We also presented pros, cons, budget and timeline for AMFitzgerald design a custom sensor.
• Because none of the commercial options were quite right, the client elected to have AMFitzgerald develop a custom accelerometer. The client favored using a standard foundry process platform for motion sensors, in order to provide a pathway to scalable 200 mm wafer manufacturing.
• AMFitzgerald designed the custom MEMS accelerometer using the motion sensor process design kit (PDK) and verified our design using simulation prior to tape-out. Functioning MEMS accelerometers with integrated microelectronic components were produced within the first prototype run at a 200 mm foundry. We collaborated with the customer to characterize the accelerometer’s performance while integrated with the product’s prototype electronics.

Public Semiconductor Foundry

See how our expertise extended to operations consulting and strategy and how our thorough approach helped the customer win new MEMS business.