2016 Emerging MEMS & Sensor Technologies to Watch
Presentation on noteworthy and commercially relevant developments in MEMS & sensors research.
Prior Reports: 2015 | 2014 | 2013 | 2012


Apr 2017: Development of a High Performance Micro-mirror Array
Mar 2017: Collaboration with Millar, Inc. to Enhance OEM MEMS Pressure Sensor Capabilities for the Medical Device Industry
Newsletters: 2016 and older


A High-speed Large-range Tip-tilt-piston Micromirror Array
Journal of Microelectromechanical Systems, December 2016
Micromirror arrays and the potential for advancing applications.
Finding a MEMS Foundry - A Roundtable Discussion
Electronics 360, July 2016
Advice on volume manufacturing of MEMS.
Making Sensors for the IoT
ANSYS Advantage, June 2016
Leveraging simulation to reduce sensor development cost.
Achieving System Cost Reduction and Performance Optimization through Semi-Custom MEMS Pressure Sensors
Sensors Magazine, Jan 2015
Using RocketMEMS® sensors to optimize sensor system design.
RocketMEMS®: Tailored MEMS Sensors for Customers Seeking Business Opportunities in the Long Tail Marketplace
CMM International, Nov 2014
How semi-custom sensors help low volume, high value products.
Choosing MEMS Pressure Sensors for Medical Device Applications
Medical Design Briefs, Nov 2014
Customizing MEMS sensors for medical applications.
Experts at the Table: Challenges for MEMS
Semiconductor Engineering, Nov 2013
Mark LaPedus interviews a panel of MEMS experts.
Letting Process Drive MEMS Design
EE Journal, Nov 2012
Bryon Moyer writes about RocketMEMS™
Predicting the Failure Probability of Device Features in MEMS
IEEExplore, Sept 2011
We detail and validate pragmatic FE-based MEMS analysis capabilities.
MEMS Structural Reliability and DRIE
MEMS Investor Journal, July 2010
Deep reactive ion etch (DRIE) is an essential MEMS fabrication process technology that leaves behind a scalloped surface prone to fracture. Smoother surfaces require slower etches, which are more costly. How smooth is smooth enough?
Maturing MEMS Sector Moves Towards Common Testing Protocols
SEMI, Oct 2010
MEMS companies haven't yet had use for cooperating on standards efforts, with the wide variety of diverse mechanical structures they make, and the process technology IP that's still a core competitive advantage.
A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices
J. Microelectromechanical Systems, Aug 2009
We describe and validate a new failure prediction methodology specifically designed for single-crystal microelectromechanical systems (MEMS) devices under general service loadings.
No Rest for the Weary: MEMS Manufacturing Must Press On, with Big Markets Ahead
AMFitzgerald White Paper, Sept 2006
The MEMS industry must strive towards some level of standardization, and foundries should lead the way to enable truly fabless service.


AMFitzgerald Company Overview
MEMS Sensors for Industrial Automation: Megatrends and Sourcing Options
MD&M West/ATX West, Feb 2017
AMFitzgerald Webinar: System, Package, and Chip Level MEMS Solutions
Audio presentation (21 minutes, 31 MB .mp4 file) or
Presentation slides only (2.5 MB .pdf)
MEMS R&D with a Manufacturing Goal
EVG Technology Day, Feb 2016
Emerging MEMS & Sensor Technologies to Watch
MEMS Executive Congress USA, Nov 2015
The Business Case for MEMS Standardization
Semicon West: MIG/SEMI Joint Workshop, July 2015
How to Successfully Transfer MEMS from a University Lab to a Commercial Foundry
Transducers, June 2015
How to Optimize System Cost, Performance, and Reliability with Semi-Custom MEMS Sensors
Sensors Expo, June 2015
Letting Process Drive Design: The RocketMEMS® Model
Semicon Europa, Oct 2014
MEMS Pressure Sensors for Medical Applications
MEPTEC Medical Electronics Symposium, Sept 2014
Implementing MEMS: Make vs. Buy?
Sensors Expo, June 2014
A Practical Guide to MEMS Inertial Sensors
Stanford Position, Navigation and Time Symposium, Nov 2013
Thinking Outside the (Mobile) Box: Other Important High-Value Applications for Sensor Fusion
Sensors Expo, June 2013
Part 1 | Part 2 | Part 3 | Part 4 | Part 5
MEMS Sensor Technology Overview
Design News Webinar, Apr 2012
Planning for MEMS Product Development
Sensors Expo, June 2011, Rosemont, IL
Leveraging Simulation in MEMS Development
Coventor MEMS+IC System Design Symposium, Oct 2010, Woburn, MA
MEMS Structural Reliability and DRIE: How Are They Related?
MEMS Investor Journal Webinar, July 2010, sponsored by Tegal Corporation
Contact Mask Design Principles
Stanford Nanofabrication Facility Open House, Apr 2004