Commentary, opinions, and insights on all things MEMS.

April 2017: Development of a High Performance Micro-mirror Array.

For the past several years, AMFitzgerald has been developing the fabrication process for a novel MEMS micro-mirror array designed by Dr. Robert Panas's research group at Lawrence Livermore National Laboratory. The technology has been developed specifically to serve LIDAR, laser communications, and other demanding applications where existing MEMS mirror array technologies are insufficient. The novel mirror architecture offers exceptional speed and tilt range, with three axes (tip-tilt-piston) feedback control and 99% fill factor.

In this video, Dr. Panas provides an overview of the Light-field Directing Array (LDA) technology. The technology is available for license from the LLNL Industrial Partnerships Office.

At the upcoming MEMS & Sensors Technical Congress, on May 11, Dr. Carolyn D. White will present a case study on how she developed this complex prototype and leveraged AMFitzgerald's ecosystem of partners to integrate specialty processes not available in our fab. Her presentation will offer a unique look inside one of our client projects and how AMFitzgerald develops novel MEMS devices. She will also offer insights on form factor-driven process challenges and development strategies for proof of concept budgets.

In-process photo of the LDA prototype during fabrication by AMFitzgerald

March 2017: Collaboration with Millar, Inc. to Enhance OEM MEMS Pressure Sensor Capabilities for the Medical Device Industry.

AMFitzgerald and Millar, Inc. are pleased to announce an official collaboration agreement to serve OEM customers seeking a complete sensor solution using micro-electromechanical systems (MEMS) technology. This agreement arises from a long history of MEMS technology development between the two companies and furthers each company’s vision to better serve the growing interest in the medical device and clinical communities for increased in vivo physiologic data.

The clinical market has experienced an upward trend of sensor integration into existing medical technologies, especially in the cardiovascular market, to enable improved patient monitoring, diagnostics and outcomes. Due to their small size, low power consumption, and low cost, MEMS sensors offer exciting new capabilities to gather in situ data at locations in the body which cannot be otherwise accessed. Pressure, temperature, motion, and flow parameters may now be directly measured.

By leveraging Millar’s ISO-13485 quality control certification and 45+ years of MEMS-enabled product manufacturing expertise, AMFitzgerald can now provide advanced and proven solutions for sensor testing, wire attach to small sensor die, and biocompatible encapsulation, delivering OEM customers a fully-packaged sensor module solution for medical device integration. The end result will be a faster path to market for companies that work with the AMFitzgerald and Millar teams.

AMFitzgerald has been developing innovative MEMS sensors and actuators for medical devices for more than 10 years. Full-service engineering capabilities include custom MEMS design, RocketMEMS®; semi-custom pressure sensors, selection of commercial sensors, electronics and packaging, foundry transfer, and supply chain creation and management.

About Millar, Inc.  Since 1969, Millar, Inc., headquartered in Houston, Texas, has led the development of catheter-based, solid-state pressure sensors and is known worldwide as the leader in sensors that advance medical understanding. Millar OEM serves the medical device and life sciences industries through its MEMS pressure sensors, ISO 13485 precision manufacturing and wireless power technology, resulting in cost savings and rapid time to market for device integration.

Millar offers proven solutions for integrating MEMS pressure sensors into invasive medical devices (Source: Millar OEM)

Prior Newsletters: 2016 and earlier